Sub-assembly or stand alone
power electronic assemblies to meet your specs
Power Vault
Provides main AC power to front end semiconductor manufacturing equipment
Specifications

Electrical

Rated Power ...............
Frequency ...................
Number/Phases ........
KFactor Rating ..........
Primary .......................

Secondary .................


Mechanical
Length .........................
Depth ...........................
Height ..........................
Weight.........................

Certifications..............
144 k VA
50/60 Hz.
Three
21
200/208/220/240/380/400/
415/440/480 VrmsL-L Delta
208/120 Vrms Wye
@ 144 kVA


24.00”
40.00”
51.00”
1,500 Lbs.

CE
Features
NEMA 1 enclosure
Primary 600 Amp adjustable electronic trip
circuit breaker with rotary handle
Secondary 400 Amp adjustable electronic trip
circuit breaker
Emergency off button
Main power indicator lamp
1

963 Ames Avenue Milpitas, CA 95035

tel(408)263-8444

fax(408)263-8448
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