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Sub-assembly
or stand alone
power electronic assemblies to meet your specs
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Power
Vault
Provides main AC power to front end semiconductor manufacturing equipment
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Specifications
Electrical
Rated Power ...............
Frequency ...................
Number/Phases ........
KFactor Rating ..........
Primary .......................
Secondary
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Mechanical
Length .........................
Depth ...........................
Height ..........................
Weight.........................
Certifications.............. |
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144
k VA
50/60 Hz.
Three
20
400/420/440 VrmsL-L Delta
208/120 Vrms Wye
@ 144 kVA
24.00
48.00
51.00
1,500 Lbs.
CE, NRTL to UL 1561,
508A, EN 60742 |
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Features
NEMA 1 enclosure
Primary 250 Amp adjustable electronic trip
circuit breaker
Secondary 400 Amp adjustable electronic trip
circuit breaker
GFI
Emergency off button with shroud
Input and output power indicator lamps |
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| 1 |
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963 Ames Avenue Milpitas, CA 95035
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tel(408)263-8444
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fax(408)263-8448
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© 2004-2005
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