Sub-assembly or stand alone
power electronic assemblies to meet your specs
Power Vault
Provides main AC power to front end semiconductor manufacturing equipment
Specifications

Electrical

Rated Power ...............
Frequency ...................
Number/Phases ........
KFactor Rating ..........
Primary .......................
Secondary .................


Mechanical
Length .........................
Depth ...........................
Height ..........................
Weight.........................

Certifications..............
144 k VA
50/60 Hz.
Three
20
400/420/440 VrmsL-L Delta
208/120 Vrms Wye
@ 144 kVA


24.00”
48.00”
51.00”
1,500 Lbs.

CE, NRTL to UL 1561,
508A, EN 60742
Features
NEMA 1 enclosure
Primary 250 Amp adjustable electronic trip
circuit breaker
Secondary 400 Amp adjustable electronic trip
circuit breaker
GFI
Emergency off button with shroud
Input and output power indicator lamps
1

963 Ames Avenue Milpitas, CA 95035

tel(408)263-8444

fax(408)263-8448
© 2004-2005